Sensor Design Optimization for Ultrasonic Spectroscopy Cure Monitoring
نویسندگان
چکیده
منابع مشابه
Ultrasonic Sensor for Photoresist Process Monitoring
An ultrasonic sensor has been developed to monitor photoresist processing in situ during semiconductor manufacturing. Photoresist development, pre-exposure bake, and postexposure bake were monitored for the Shipley 1800 series I-line resists, and the pre-exposure bake of Shipley APEX-E deep-uv (DUV) resist was monitored as well. Development monitoring was achieved by measuring thickness changes...
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The monitoring of human breathing activity during a long period has multiple fundamental applications in medicine. In breathing sleep disorders such as apnea, the diagnosis is based on events during which the person stops breathing for several periods during sleep. In polysomnography, the standard for sleep disordered breathing analysis, chest movement and airflow are used to monitor the respir...
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Air quality and personal pollutant exposure measurement are important for the health and productivity of individuals. Accurate measurement of personal exposure is challenging because of the spatially and temporally heterogeneous distribution of pollutant concentrations. We propose to use low-cost and miniature mobile sensor networks to provide real-time measurement of the environment directly s...
متن کاملUltrasonic Cure Monitoring of Photoresist During Pre-Exposure Bake Process
We have developed a sensor to measure the glass transition temperature (T,) of photoresist during its pre-exposure bake. During prebake, the resist must reach this temperature in order for significant solvent evaporation to occur. To determine T, we measured the change in phase of a high frequency pulse as it was reflected from the interface between an 8” silicon wafer and a photoresist film. T...
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The deployment of a wireless sensor network to monitor subjects’ locations and relative distances during psychological experiments is discussed. As its primary function, an overhead array of ultrasound sensors automatically tracks a parent, child and stranger over a 4.45 m×4.23 m observation area. The array of ultrasonic-equipped motes can resolve two point targets separated by at least 73 cm. ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2018
ISSN: 1424-8220
DOI: 10.3390/s18061819